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    • 专利摘要:
    A bolometer-type detection structure (10) for detecting electromagnetic radiation. The detection structure (10) comprises a transistor (100) of the MOS-FET type associated with the absorbent element for detecting the temperature rise of said absorbent element during absorption of the electromagnetic radiation. The transistor (100) comprises at least a first and at least a second zone (111, 112), at least a third zone (113) separating the first and the second zone (111, 112) from one another, and at least one first gate (120) arranged to bias the third zone (113). The first gate (120) has at least a first metal portion forming the first absorbent element. The first metal portion having a thickness Ep respecting the following inequalities: 150Ω ≤ p / Ep ≤ 700 Ω. The invention also relates to a method of manufacturing such a structure
    公开号:FR3056292A1
    申请号:FR1658921
    申请日:2016-09-22
    公开日:2018-03-23
    发明作者:Jean-Jacques Yon；Etienne FUXA
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    Holder (s): COMMISSIONER OF ATOMIC ENERGY AND ALTERNATIVE ENERGIES Public establishment.
    Extension request (s)
    Agent (s): BREVALEX Limited liability company.
    FR 3 056 292 - A1
    BOLOMETER-TYPE ELECTROMAGNETIC RADIATION DETECTION STRUCTURE AND METHOD FOR MANUFACTURING SUCH A STRUCTURE.
    ©) Detection structure (10) of bolometer type for the detection of electromagnetic radiation. The detection structure (10) comprises a transistor (100) of the MOS-FET type associated with the absorbent element for detecting the rise in temperature of said absorbent element during the absorption of electromagnetic radiation. The transistor (100) comprises at least a first and at least a second zone (111, 112), at least a third zone (113) separating the first and the second zone (111,112) from each other, and at at least a first grid (120) arranged to polarize the third zone (113). The first grid (120) comprises at least a first metal portion forming the first absorbent element. The first metal portion having a thickness Ep respecting the following inequalities: 150Ω p / Ep 700 Ω. The invention also relates to a method of manufacturing such a structure
    BOLOMETER TYPE ELECTROMAGNETIC RADIATION DETECTION STRUCTURE AND METHOD FOR MANUFACTURING SUCH A STRUCTURE
    DESCRIPTION
    TECHNICAL AREA
    The invention relates to the field of optoelectronics and the detection of electromagnetic radiation.
    The invention thus more specifically relates to a structure for detecting electromagnetic radiation of the bolometer type and a method of manufacturing such a structure.
    PRIOR STATE OF THE ART
    In order to detect electromagnetic radiation, in particular in the infrared wavelength range, it is known to use structures for detecting electromagnetic radiation of the bolometer type.
    Such a structure includes:
    an absorbent element configured to absorb electromagnetic radiation, generally provided in the form of a suspended membrane, a transducer having a characteristic which varies with temperature, the transducer being associated with the absorbent element in order to allow detection of the elevation of temperature of said absorbent element during the absorption of electromagnetic radiation.
    Conventionally, the transducer is provided by a layer having thermistor properties, such as a layer of a metal oxide selected from the group comprising vanadium oxides VOx, nickel oxides NiOx, titanium oxides TiOx, or a aSi amorphous silicon layer.
    However, with such a transducer and with such a configuration, such structures cannot be integrated in the form of a matrix in a component having a network pitch of less than 10 μm. Indeed, in order to preserve an acceptable sensitivity, the surface of the absorbent element must be sufficient due to the limited sensitivity of the metal oxide layers used as a transducer, the temperature coefficient not exceeding 2 to 2, 5% .K 1 with such layers.
    In order to provide bolometer-type detection structures having a sensitivity compatible with integration into components having network pitches of less than 10 μm, several avenues have been envisaged.
    Among these, we can notably cite the possibility taught by the document US 7489024 which proposes to replace the transducer by a MOS-FET type transistor operating in low inversion regime. Indeed, such a substitution makes it possible to achieve a temperature coefficient of up to 10% .K 1 · Nevertheless, the implementation proposed in document US 7489024 presents, despite an optimized temperature coefficient, a large number of disadvantages which make this type of structure incompatible with integration into components having network pitches of less than 10 μm.
    Indeed, by design, the structure described in document US 7489024 uses layers made of silicon dioxide as an absorbent element. These layers, by their function, must have a significant thickness. This therefore results in significant thermal inertia and therefore a degraded response time. In addition, these layers are also provided at the level of insulating arms which isolate the structure from the rest of the component which it equips. Such promiscuity generates a loss to the rest of the component of part of the heat generated by the absorption of electromagnetic radiation.
    For these reasons and in order to maintain an acceptable sensitivity, the work of the inventors of the structure described in US 7489024, published in particular in the scientific journal "IEEE translation on Electron devices" volume 56 number 9 pages 1935 to 1942 in 2009, did not not possible to obtain structures whose sizing is compatible with integration in the form of a matrix in a component having a network pitch of less than 10 μm. Indeed, the minimum surface required for such a structure is 45 μm by 46 μm.
    STATEMENT OF THE INVENTION
    The invention aims to remedy this drawback and thus aims to provide a bolometer type structure capable of being integrated in the form of a matrix in a component having a network pitch of less than 10 μm.
    To this end, the invention relates to a bolometer-type detection structure for the detection of electromagnetic radiation, the detection structure comprising:
    at least a first absorbent element configured to absorb electromagnetic radiation, a MOS-FET type transistor associated with the first absorbent element to detect the rise in temperature of said absorbent element during the absorption of electromagnetic radiation, the transistor comprising:
    o at least a first and at least a second zone of a first type of conductivity, o at least a third zone separating the first and the second zone from each other, the third zone being of a type of conductivity selected from a group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone is substantially empty of carriers, o at least one first grid arranged to polarize the third zone.
    The first grid comprises at least a first metal portion forming the first absorbent element, said first metal portion having a thickness Ep respecting the following inequalities: 150/3 <- <600/3 with p the resistivity
    Ep of the metallic material forming said metallic portion.
    With such a supply of the absorbent element in the form of a portion of the first metal grid, the operation of the structure is thereby optimized. Indeed, because of these inequalities, the first metallic portion has an impedance close to that of the vacuum which is of the order of 377 Ω, this for relatively small thicknesses of the order of 10 nm. The absorbent element therefore does not need to have a significant thickness to obtain an absorption greater than 85%. This reduces significantly compared to the prior art the mass of the necessary absorbent element and its inertia. Thus the structure which has a low inertia and an optimized sensitivity compared to the structures of the prior art. This sensitivity is therefore particularly suitable for integrating the structure in the form of a matrix in a component having a network pitch of less than 10 μm.
    Advantageously, the thickness of the first metal portion respects the following inequalities:
    170/3 <-E <600/3.
    Ep
    In this way it is possible to obtain an absorption greater than
    90%.
    Ideally, the thickness of the first metal portion respects the following inequalities:
    320/3 <^ - <420/3 Ep - can be substantially equal to 377 Ω, i.e. between 360 Ω
    Ep and 380Ω.
    Ωη may note that such a configuration can in particular be obtained with a metal portion made of titanium nitride TiN 10 nm thick.
    By type of conductivity in which the third zone is substantially empty of carriers, it should be understood above and in the rest of this document that the third zone has a type of conductivity and a thickness such that, in the absence of polarization of the detection structure, the third zone is substantially empty of carriers. Of course, in operation and during the application of a polarization on the grid, the creation of the conduction channel makes it possible to populate the third zone of carriers of the first type of conductivity. Ωη may note that for the person skilled in the art the indication that "the third zone is depleted" is synonymous with such a type of conductivity in which the third zone is substantially empty of carriers.
    By MOS-FET transistor, terminology generally used by those skilled in the art, it is understood above and in the rest of this document, metal / oxide / semiconductor field effect transistor. Indeed, the acronym MOS-FET originates from the English terminology "Metal-Oxide-Semiconductor Field Effect Transistor".
    The first metallic portion of the first grid is made of a metal of the “middle-of-gap” type for the third zone, the first metallic portion preferably being of a metal chosen from the group comprising titanium nitrides, tantalum nitrides. and molybdenum silicides for a third zone made of silicon, the first metal portion being advantageously made of titanium nitride for a third zone made of silicon.
    The inventors have discovered that with such an adaptation of the output work of the first metal portion vis-à-vis the third, the transistor can operate with a relatively low inversion voltage since source voltages are between 50 mV and 75 mV are accessible while offering a high sensitivity of the transistor current to temperature. Thus, the Joule effect linked to the polarization of the structure remains contained and hardly disturbs the functioning of the structure.
    It is understood above and in the rest of this document by “metal of the middle-of-gap type” that the metal is chosen so as to present, in the absence of polarization of the structure, its Fermi energy in the band area prohibited from the third zone and more precisely in the vicinity of the middle of the prohibited band of the third zone, typically at an energy level distant from the middle of the prohibited band in a range between -25% and + 25% of the gap the prohibited band. Such a grid configuration is generally known to those skilled in the art under the English name "midgap". Thus, in the case where the third zone is made of silicon, the “mid-gap type metals” include in particular titanium nitrides, tantalum nitrides and molybdenum silicides.
    The first grid is short-circuited with one of the first and the second zone.
    With such a configuration, enabled by the possibility of operating at low inversion voltage for a metal portion of the first grid is made of a metal of the “middle-of-gap” type, the structure requires only two conduction tracks for be polarized. The electrical, and therefore thermal, conduction paths between the reading electronics and the transistor are reduced to a minimum. It is therefore possible to provide thermal insulation between the transistor and the particularly optimized reading electronics.
    The first zone is surrounded by the third zone, the third zone being surrounded by the second zone.
    With such a configuration, the first grid has a high ratio of the grid width to the grid length, width and length of grid to be considered as it is customary to express them in the formalism describing the operation of MOS-FETs. , that is to say relative to the direction of current flow between the first and the second region of the transistor. Such a ratio makes it possible to increase the sensitivity of the transistor current to temperature. With such a configuration, such a ratio can also be obtained with a particularly long grid length to optimize the signal-to-noise ratio of the structure since the noise is directly linked to the surface of the grid. It is thus noted that with such a configuration, it is possible to obtain a length of the first grid greater than 0.5 μm. It is also noted that with such a configuration, the first zone of the transistor is limited to a single portion and the second zone of the transistor to another single portion. The grid is therefore de facto imposing and the ring shape is that which optimizes both its surface and the ratio of its width to its length in the space imposed by the pixel.
    The transistor can also include:
    a fourth and fifth zone, the fourth zone being of the first type of conductivity and the fifth zone being of a type of conductivity selected from the group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone is substantially empty of carriers, a third grid arranged to polarize the fifth zone, in which the fifth zone separates the second and the fourth zone from one another, and in which the third grid comprises at least a second portion metallic forming a second absorbent element, said second metallic portion having a thickness Ep respecting the following inequality: 150/3 <- <
    Ep
    600/3 with p the resistivity of the metallic material forming said second metallic portion.
    The fifth zone may surround the second zone, the fourth zone surrounding the fifth zone.
    Thus, with such characteristics, the grid surfaces of the first and the third grid add up, the total surface of the grid is particularly large. The signal to noise ratio can therefore, for this reason, be particularly optimized for such a structure.
    The third zone can be of the conductivity type in which the third zone is substantially empty of carriers.
    With such a third zone, the parasitic effects linked to a substrate with floating potential, such as those linked to the Kink effect, are contained, or even absent. It is therefore not necessary to add a connection to polarize the channel, ie the third zone. The thermal insulation of the transistor is therefore not degraded by such a channel polarization connection.
    There may be provided a reflecting surface configured to form with the first absorbing element a quarter wave cavity.
    In this way, the part of the electromagnetic radiation not absorbed by the first absorbing element is reflected by the reflecting surface in the direction of the first absorbing element in order to be absorbed there. This phenomenon is all the more amplified due to the resonance created by the formation of the quarter-wave cavity.
    The first grid can be separated from the third zone by a first and a second electrically insulating layer, one of the first and the second electrically insulating layer being made of silicon dioxide, the other of the first and the second layer electrically insulating being produced by dielectric insulator with high dielectric constant.
    In this way it is possible to provide an insulation thickness between the first gate and the relatively small third zone while limiting the contribution of the noise 1 / f during the operation of the transistor.
    It should be understood above and in the rest of this document, by “dielectric insulator with high dielectric constant”, or, according to the English name generally used by a person skilled in the art, by dielectric material “high-K”, a insulating material whose dielectric constant is high compared to that of silicon dioxide which is equal to 3.9. Thus, a dielectric material can be considered as a material with a high dielectric constant if it has a dielectric constant greater than or equal to at least 1.5 times, or even 2 to 3 times, that of silicon dioxide.
    The structure may further include a reading circuit configured to bias the transistor and to determine, from an operating current of the transistor a rise in temperature of the absorbing element, the reading circuit and the transistor being separated one from the other by at least a first and a second isolation arm each comprising at least one conductive track for biasing the transistor.
    In this way, the thermal contact between the transistor and the read circuit is reduced to a minimum. The structure therefore has a relatively low thermal inertia and sees its sensitivity preserved.
    Each of the conductive tracks of the first and second insulation arms can be a metallic track forming a third absorbent element and has a thickness Ep respecting the following inequality: 150/3 <- <600/3 with p the resistivity of the
    Ep metallic material forming said second metallic portion.
    In this way, the part of the electromagnetic radiation not absorbed by the first absorbing element can be absorbed by the conductive tracks and participate in part in the rise in temperature of the transistor.
    The transistor may further comprise a second gate on a face of the transistor which is opposite to the first gate, the second gate comprising at least one metallic portion a fourth absorbent element.
    Such a second gate makes it possible to adjust the threshold voltage of the transistor while increasing the surface of the absorbing element. The signal-to-noise ratio is therefore improved.
    The invention also relates to a method for manufacturing a detection structure comprising the following steps:
    providing at least a first, second and third zone, the first and second zone being of a first type of conductivity, the third zone separating the first and the second zone from one another and the third zone being d '' a type of conductivity selected from a group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone is substantially free of carriers, formation of a first grid arranged to polarize the third zone of so as to form a MOS-FET type transistor, the first gate comprising at least a first metal portion forming an absorbent element configured to absorb electromagnetic radiation, in this way the transistor is associated with the absorbent element to detect the rise in temperature of said absorbent element during absorption of electromagnetic radiation, said first metal portion having a thickness Ep respe being the following inequality: 150/3 <- <600/3 with p la
    Ep resistivity of the metallic material forming said metallic portion.
    Such a method makes it possible to provide a structure according to the invention and therefore to benefit from the advantages which are linked to it.
    During the step of forming the first grid, the first metallic portion of the first grid is made of a metal of the “middle-of-gap” type for the third zone, the first metallic portion preferably being of a metal chosen from the group comprising the titanium nitrides, the tantalum nitrides and the molybdenum silicides for a third zone made of silicon, the first metallic portion being advantageously made of titanium nitride for a third zone made of silicon.
    Thus, the structure obtained with such a method benefits from the advantages linked to the use of a first metal portion of the “middle-of-gap” type and therefore allows the transistor to operate at low inversion voltage.
    In addition, steps can be planned:
    formation of a reading circuit configured to bias the transistor and to determine, from an operating current of the transistor a rise in temperature of the absorbing element, formation of a first and a second isolation arm each of the first and second isolation arms comprising at least one conductive track, association together of the transistor, the first and second isolation arms and the read circuit, so that the read circuit is electrically connected to the transistor by the 'through the respective conductive tracks of the first and second insulating arms.
    The structure thus produced has an optimized insulation with respect to the reading circuit, this in particular through the use of the first and second isolation arms.
    During the step of supplying the reading circuit, a sub-step may be provided for forming a reflection surface,
    During the step of associating together the transistor, the first and second isolation arms and the reading circuit, the reflection surface may have an arrangement so as to form with the titanium nitride portion of the first grid a quarter wave cavity.
    Thus, the fabricated structure benefits from the advantages linked to such a reflection surface.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of exemplary embodiments, given for purely indicative and in no way limiting, with reference to the appended drawings in which:
    Figures IA to IC schematically illustrate a structure according to the invention with in Figure IA a top view showing in dotted lines the various elements making up the structure, in Figure IB and IC a sectional view of this same structure along the axis BB respectively and axis AA, FIGS. 2A and 2B schematically illustrate, this during manufacture, the parts of the structure respectively forming a reading circuit and a reflector, with in FIG. 2A a view from above and in FIG. 2B a view in section along the axis CC, FIGS. 3A and 3B schematically illustrate, this during manufacture, the parts of the structure respectively forming an absorbent element and a transducer, with in FIG. 3A a top view and in FIG. 3B a view in section along the axis DD, FIGS. 4A and 4B schematically illustrate, this during manufacture, the parts of the structure respectively forming insulating arms and the reflector, with in FIG. 4A a view of from above and in FIG. 4B a sectional view along the axis EE, FIG. 5 diagrammatically illustrates the organization in matrix of four structures according to the invention when they equip a component, FIG. 6 diagrammatically illustrates in top view a structure according to a second embodiment in which the transducer has five zones.
    Identical, similar or equivalent parts of the different figures have the same reference numerals so as to facilitate the passage from one figure to another.
    The different parts shown in the figures are not necessarily according to a uniform scale, to make the figures more readable.
    The different possibilities (variants and embodiments) must be understood as not being mutually exclusive and can be combined with one another.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    FIG. 1A schematically illustrates a detection structure 10 of the bolometer type according to the invention, such a detection structure 10 being adapted for the detection of electromagnetic radiation.
    Such a detection structure 10 is more particularly aimed at detecting electromagnetic radiation in the infrared wavelength range. Thus, the different values indicated in the embodiments described below relate to this practical application, in which the target wavelength range is far infrared, that is to say between 8 and 12 μm. Of course, the person skilled in the art is perfectly capable, from the present disclosure, of adapting these values in order to allow, using such a detection structure 10, the optimized detection of electromagnetic radiation in a range of wavelengths other than that of infrared.
    Such a detection structure 10 comprises:
    a transistor 100 of the MOS-FET type comprising:
    o at least a first and at least a second zone 111, 112 of a first type of conductivity, o at least a third zone 113 separating the first and the second zone from one another 111, 112, the third zone 113 being of a type of conductivity in which the third zone is substantially empty of carriers, in other words the third zone 113 is completely depleted, o a first grid 120 arranged to polarize the third zone 113, the first grid comprising a first layer d absorption 210 of titanium nitride TiN forming the first absorbent element, o an optional second grid 130 arranged on the face of the third zone which is opposite to the first grid 120 to polarize the third zone 113, a first and a second arm d insulation 310, 320 respectively comprising a first and a second conduction track 311, 321 to allow the biasing of the transistor 100, the first track 311 being connected to the second zone 112, the second track 321 being connected to the first and third zones 111,113 by short-circuiting them, an optional reflection surface 330, 331 arranged so as to form with the first absorption layer a quarter wave cavity, a circuit reading 340 of which only the substrate 341 is shown, the reading circuit 340 being electrically connected to the first and second conduction tracks 311, 321 via respectively a first, second, third and fourth bonding pad 354, 355, 316, 326.
    It will be noted that in such a configuration, the first zone 111 forms the drain of the transistor, the second zone 112 forms the source of the transistor and the third zone 113 the channel of the transistor 100. Thus the transistor 100, in this first embodiment, operates in low insertion, the drain and the gate being in short-circuit and the source-drain voltages Vsd and gate source Vsg being equal.
    Such a detection structure 10 can be manufactured in four different stages, a first stage during which the reading circuit 340 is supplied, a second stage during which the transistor 100 and its first gate 120 are provided, forming the first absorbing element, a third step during which the isolation arms 310, 320 are formed in contact with the transistor 100 and a fourth step during which the transistor 100 / isolation arm 310, 320 assembly is bonded to the read circuit 340. During this fourth step, it is also possible to produce the second grid 130.
    FIGS. 2A and 2B thus illustrate the read circuit 340 during manufacture during the step of supplying the read circuit.
    Thus, the reading circuit 340 is, as illustrated in FIGS. 2A and 2B, arranged in a semiconductor support 341, such as a silicon substrate, in which the components of the reading circuit are arranged. The read circuit 340 is configured to bias the transistor and to determine, from an operating current of the transistor 100, a rise in temperature of the first gate 120. Such a read circuit 340 is only shown by means of dotted lines representing its location in the support 341. Such a read circuit 340 is of a type known to those skilled in the art and can therefore be a read circuit dedicated to a single transistor 100 as well as a shared circuit for a group or for all the transistors equipping a component 1 (refer to FIG. 5) or even a reading circuit composed of a part dedicated to a single transistor and of a shared part for a group or for all the transistors equipping a component 1. Since such read circuits, generally of MOS technology, are known to those skilled in the art, they are not described more precisely in this document.
    In order to ensure the connection between the reading circuit 340 and the transistor 100, the reading circuit 340 comprises, on a connection face of the semiconductor support 341, a first and a second connection pad 342, 343. The first and the second connection pad 342, 343 are made of a metallic material suitable for forming ohmic contact with the reading circuit. Thus, such a metallic material can be, for example, made of copper. The first and second connection pads 342, 343, in the context of a practical application of the invention, may have an area of 1 μm by 1 μm. It can also be noted that in FIG. 2A are also shown the first and second connection pads 342B, 343A of respectively a first and a second adjacent detection structure.
    The connection face of the semiconductor support 341 is also provided, as illustrated in FIG. 2B, with a metal layer 344 to allow the formation of a first part 330 of the reflection surface 330, 331. Thus, the metal layer 344 extends over a major part of the surface of the detection structure
    10. It will be noted that in the practical application of the invention, the surface occupied by the detection structure 10 can be an area of 5 μm by 5 μm.
    The connection face which is not coated by the first and the second connection pad 342, 343 and by the metal layer 344 is covered with a first passivation layer 345. It may be noted that according to one possibility of the invention , such coverage of the connection side can be provided by a Damascene process. The first passivation layer 345 is produced from a dielectric material such as silicon dioxide SIO2 or silicon nitride SÎ3N4.
    The first passivation layer 345, the first and second connection pads 342, 343 and the metal layer 344 are covered by a first barrier layer 351. The first barrier layer 351 is itself covered by a first layer sacrificial 352. The first sacrificial layer 352 and the first stop layer 351 are made of materials allowing selective etching, preferably chemical, of the first sacrificial layer 352, the first stop layer 351 therefore making it possible to stop the etching in order to protect in particular the first passivation layer 345. Thus, conventionally, the first sacrificial layer 352 can be made of silicon dioxide S1O2, the first stop layer 351 then being made of alumina AI2O3 or aluminum nitride AIN, the selective etching then being obtained by a chemical attack with hydrofluoric acid, preferably in the vapor phase.
    The first barrier layer 351 and the first sacrificial layer 352 are both traversed, over their thickness and at the first and second connection pads 342, 343 and the metal layer 344, by metal pillars 353 forming, for the first and second connection pads 342, 343, connection via. The metallic material of the metallic pillars 353 can be copper. In a practical application of the invention, the metal pillars 353 have a circular section whose diameter is substantially equal to 0.3 qm. Thus each of the first and second connection pads 342, 343 is in contact with four metal pillars.
    The first sacrificial layer 352 also includes:
    a first and a second bonding pad 354, 355 associated respectively with the first and second connection pads 342, 343 by means of the metal pillars 353,
    the first part 330 of the reflection surface 330, 331 associated with the metal layer 344 by means of the metal pillars 353.
    In this way, the first and second bonding pads 354, 355 are electrically connected to the first and second connection pads respectively.
    342, 343, the first part 330 of the reflection surface 330, 331 being mechanically connected to the metal layer 344 by means of the metal pillars 353.
    The first and second bonding pads 354, 355 and the reflective layer 330 are flush with the first sacrificial layer 352 on the face of the first sacrificial layer 352 which is opposite to the first barrier layer 351.
    In a practical application of the invention, the bonding pads may have, for example, an area of lpm by lpm.
    Thus, the step of supplying such a read circuit includes the following substeps:
    supply of the substrate 341 in which the reading circuit 340 has previously been produced, formation of the first passivation layer 345, formation of the first and second connection pads 342, 343 and of the metal layer 344, in the thickness of the passivation layer 345, deposition of the first barrier layer 351 in contact with the first and second connection pads 342, 343, of the metal layer and of the first passivation layer 345, deposition of the first sacrificial layer 352 in contact with the first barrier layer 351, provision of through passages in the first barrier layer 251 and in the first sacrificial layer 352, said through passages leading to the first and second connection pads 342, 343 and the metal layer 344 for allow the formation of metal pillars 353, provision of surface openings in the first sacrificial layer 352 corresponding to the first and second bonding pads 354 , 355 and at the first part 330 of the reflection surface 330, 331, deposition of a metallic material in the through passages to form the metal pillars 353, the first and second bonding pads 354, 355 and the first part 330 of the reflection surface 330, 331.
    It will be noted that it is possible to provide, in order to promote molecular bonding, a sub-step of planarization of the first sacrificial layer 352, of the first part 330 of the reflection surface 330, 331 and of the first and second pads of collage 354, 355.
    FIGS. 3A and 3B illustrate the transistor 100 during manufacture during the step of supplying the transistor 100 and its first gate 120 forming the first absorbent element. It can be noted that in FIGS. 3A and 3B the transistor 100 comprises the second gate 130 and a first portion second stop layer 141 covering the first, second and third zone 111, 112, 113 on their face which is opposite to the first grid 120. In a preferred variant of the invention, the second grid 130 and the first portion second stop layer 141 covering the first, second and third zone 111, 112, 113 may nevertheless be formed subsequently during the step of bonding of the transistor 100 / isolation arm 310, 320 assembly with reading circuit 340. It will be noted that the first and second zones 111, 112 and the first gate 120 are covered, on the face by which they are connected to the first and second conduction tracks 321, by a second portion of the barrier layer 141.
    We can thus see in FIG. 3A which illustrates a front view of the transistor 100 according to the face by which the transistor 100 must be connected to the reading circuit 340. It can thus be seen that the first, second and third zones 111, 112, 113 of transistor 100 are concentric, the first zone 111 is surrounded by the third zone 113, the third zone 113 being surrounded by the second zone 112. It can thus be seen in FIG. 3A that the first zone 111 occupies a central square surface, the third zone 113 occupying a square surface hollowed out from the first zone 111, the second zone occupying the rest of the surface of the transistor 100.
    The first, second and third zones 111, 112, 113 are all three formed in a semiconductor layer 110 of silicon. The first and second zones 111, 112 have a first type of conductivity while the third zone 113 is a totally depleted zone. Such a depletion of the third zone 113 can be obtained by means of a silicon on oxide substrate, or SOI for the English acronym of “Silicon on insulator”, the thickness of the layer of silicon on insulator of which has been thinned by thermal oxidation and deoxidation at a thickness between 15 and 50 nm, preferably between 25 and 50 nm, or even substantially equal to 50 nm.
    Of course, if such a total depletion of the third zone 113 is advantageous, it is also possible, without departing from the scope of the invention, for the third zone 113 to be of a second type of conductivity opposite to the first conductivity type.
    The third zone 113 is covered with the first grid 120 and is separated from the latter by first and second electrically insulating layers 121, 122. In order to minimize the operating voltage of the transistor, the first insulating layer 121, in contact with the third zone, is made of silicon dioxide S1O2 while the second insulating layer 122, in contact with the first insulating layer 121, is made in a dielectric insulator with a high dielectric constant such as Hafnium oxide. It may be noted that in a practical application of the invention, the first insulating layer 121 may have a thickness of 9 nm, while the second insulating layer 122 made of hafnium oxide has a thickness of 3 nm.
    The first grid 120, in contact with the second insulating layer 122, may comprise the first absorption layer 210 and a first conductive layer 125. The first absorption layer 210 in contact with the second insulating layer 122 is produced by titanium nitride TiN while the first conductive layer 125 in contact with the first absorption layer 210 is made of a material suitable for allowing an ohmic connection between the first grid 120 and the second conduction track 321 of the second insulation arm 320. In a practical application of the invention, the first absorption layer 210 has a thickness of 10 nm, while the first conduction layer 125 is made of doped polycrystalline silicon Si and has a thickness of 70 nm.
    With such a configuration, the first grid 120 forms a grid called "middle-of-gap". Indeed, the use of a first absorption layer of titanium nitride TiN in contact with the insulating grid layers makes it possible to obtain a difference in output work between the silicon of the third zone and the metal of the grid. such that the threshold voltage of transistor 100 is low. Thus, this configuration allows operation of the transistor with a gate / source voltage between 2KT / q and 3KT / q (K being the Bolzmann constant, T the operating temperature of the transistor and q the elementary load), that is that is to say between 50 and 75 mV at ambient temperature, this is 300 K. In addition, in the case where the thickness of the first absorption layer 210 is substantially equal to 10 nm as is the case in the practical application of the invention, the resistance of the first absorption layer 210 is substantially adapted to that of the vacuum, that is to say 377 ohms, which promotes the absorption of electromagnetic radiation by the first layer absorption 210.
    As a variant, other configuration of the grid can be envisaged in the context of the invention. Thus, the first grid 120 may comprise, in place of the first absorption layer of titanium nitride, a first metal portion forming the first absorbent element, said first metal portion having a thickness Ep respecting the following inequalities:
    150/3 <- <700/3 with p the resistivity of the metallic material forming
    Ep said metal portion.
    In order to provide absorption of electromagnetic radiation, this same first metallic portion can advantageously respect the following inequalities:
    320/3 <^ - <420/3 Ep
    Even more advantageously - can be substantially equal to
    Ep
    377 Ω, i.e. between 360 Ω and 380 Ω.
    According to this variant, the metallic material of the first metallic portion can be a metal of the “middle-of-gap” type for the third zone 113, the first metallic portion preferably being made of a metal chosen from the group comprising titanium nitrides, tantalum nitrides and molybdenum silicides for a third zone made of silicon. It may also be noted that according to a less advantageous possibility of the invention in which the metallic material of the first metallic portion is not a metal of the “middle-of-gap” type, the first metallic portion can be made of an alloy aluminum and titanium.
    As illustrated in FIG. 3B, the assembly formed by the first, second and third zones 111, 112, 113, the first and second insulating layers 121, 122, the first absorption layer 210 and the conduction layer 125 is surrounded by a second barrier layer 141. The second barrier layer 141 is itself coated, on its face which covers the first grid 120 and the first and second zones 111, 112, with a second sacrificial layer 142. The second stop layer 141 and the second sacrificial layer are both crossed by a first, a second and a third via conductor 145, 146, 147 leading respectively to the first zone 111, the second zone 112 and the first grid 120. From the same as the first sacrificial layer 352 and the first barrier layer 351, the second sacrificial layer 142 and the second barrier layer 141 are made of materials allowing selective etching, preferably chemical, of the a second sacrificial layer 142, the second stop layer 141 therefore making it possible to stop the etching. Thus, the second sacrificial layer 142 can be made of silicon dioxide S1O2, the second stop layer 141 then being made of alumina AI2O3 or aluminum nitride AIN.
    In order to provide an optimized contact between each of the first, second and third via conductors 145,146,147 and the first and second zone 111,112 and the first grid 120, each of the first, second and third via conductors 145, 146,147 comprise a contact portion in titanium Ti 30 nm thick, an intermediate portion in titanium nitride TiN 60 nm thick and a longitudinal portion in tungsten W.
    As illustrated in FIG. 3B, the second barrier layer 141 can also be coated, on its face opposite to the second sacrificial layer 142, with the second grid 130. According to this possibility, the second barrier layer 142 forms an insulator electric which allows to electrically isolate the second grid from the first, second and third zones 111,112,113. As specified above, according to a preferred variant of the invention, the first portion, the second sacrificial layer 142 and the second grid 130 can be formed during the fourth step. Thus, the first portion, the second sacrificial layer 142 and the second grid 130 are described more precisely in connection with the fourth step.
    Thus, the step of supplying such a transistor comprises the following substeps:
    supply of the SOI type substrate, not illustrated etching and thinning of the substrate in order to provide a completely depleted silicon layer 110, deposition of the first insulating layer 121, in contact with the silicon layer, deposition of the second insulating layer 122, contact with the first insulating layer 121, deposition of the first absorption layer 210 in contact with the second insulating layer 122, deposition of the conductive layer 125 in contact with the first absorption layer 210, selective etching of the conductive layer 125 , of the first absorption layer 210, of the insulating layer 122 and of the first insulating layer 121 so as to form the first gate 120, implantation of the silicon layer of doping elements of the first type of conductivity in order to form the first and second zones, the first grid making it possible to protect the third zone 113 during implantation, deposition of the second barrier layer 141, deposition of at least the second portion of the second sacrificial layer 142, opening of a first, second and third passage in the second portion, second stop layer 141 and in the second sacrificial layer
    142 corresponding respectively to the first, second and third via, the first, second and third passages opening respectively in the first and second zone 111,112 and the first grid 120, successive deposition in the first, second and third passages of the first contact portion in titanium Ti, the intermediate portion in titanium nitride TiN and the longitudinal portion in tungsten W.
    In the case where, according to a non-preferred variant of the invention, the first portion of the second barrier layer 141 and the third grid are formed during this fourth step, the first portion of the sacrificial layer 142 is formed simultaneously with the second portion of the sacrificial layer 142 during the step of depositing at least the second portion of the second sacrificial layer 142 and the step of supplying such a transistor further comprises the following substeps:
    - Opening of a through passage 131, illustrated in FIG. 1B, in the first portion of the second sacrificial layer 142, said through passage opening into the second zone 112, formation of the second grid 130 in contact with the first portion of the second sacrificial layer 142, a conductive via then being formed in the through passage 131 between the second grid 130 and the second zone 112.
    FIGS. 4A and 4B illustrate the isolation arms 310, 320 during manufacture during the step of supplying the isolation arms 310, 320. The first and second isolation arms 310, 320 are supplied in contact with the second sacrificial layer 142.
    Thus, the first and second insulation arms 310, 320 each include:
    a first stiffening layer 312, 322 in contact with the second sacrificial layer 142, the corresponding conduction track 311, 321 in contact with the first stiffening layer 312, 322 on the face of the first stiffening layer 312, 322 which is opposite to the second sacrificial layer 142, a second stiffening layer 313, 323 in contact with the corresponding conduction track 311, 321 on the face of the corresponding conduction track 311, 321 which is opposite to the first stiffening layer 312 , 322.
    The first and second isolation arms 310, 320 are configured to thermally isolate transistor 100 from the rest of component 1. Thus, as illustrated in FIG. 4A, the first and second isolation arms 310, 320 have a length maximum for minimum width and thickness. Thus, the first and second insulation arms 310, 320 are each in the form of a coil occupying half of the surface of the structure. As a variant, other configurations of the first and second insulation arms 310, 320 can be envisaged. For example, each of the first and second insulating arms 310, 320 may be in the form of interlocking meanders by abutting perpendicular segments with each other.
    The first and second stiffening layers 312, 322, 313, 323 of the first and second insulation arms 310, 320 are made of a material resistant to the selective attack of the first and second sacrificial layers 352, 142. Thus, in a practical application of the invention, the first and second stiffening layers 312, 322, 313, 323 of the first and second insulation arms 310, 320 can be made of amorphous silicon, alumina AI2O3 or nitride of aluminum AIN. The first and second stiffening layers 312, 322, 313, 323 of the first and second insulation arms 310, 320 may have a thickness ranging from 10 to 100 nm, preferably from 20 to 60 nm, or even be substantially equal to 20 nm, this in order to ensure sufficient rigidity to support the transistor 100.
    The first stiffening layer 312 of the first insulating arm 310 has, at the second via conductor 146, a breakthrough in which is formed a first conductor in order to bring the first conduction track 311 into electrical contact with the second via conductor 146. Similarly, the first stiffening layer 322 of the second insulating arm 320 has, at the first and third via conductor 145, 147, two openings in which are formed a first and a second conductor in order to contacting the second conduction track 321 in electrical contact with the first and the third respectively via conductor 145,147.
    It can be noted that advantageously, the first and second conductors can be formed during the deposition of the first conduction track 311 by filling in the corresponding breakthroughs with the metallic material forming the conductive track 311.
    According to an advantageous possibility of the invention, the first and second conduction tracks 311, 321 can be made of titanium nitride TiN (typical thickness 10 nm). In this way, the first and second insulation arms 310, 320 form a third absorbent element to that formed by the first grid 120. As a variant, and in the same way as for the first grid 120, the first and the second conduction track 311, 321 can be made of a metal and have a thickness Ep respecting the following inequalities:
    150/3 <- <700/3 with p the resistivity of the metallic material forming
    Ep said conduction track 311, 321. In order to provide absorption of electromagnetic radiation, this same conduction track 311, 321 can advantageously respect the following inequalities:
    320/3 <^ - <420/3 Ep
    Even more advantageously - can be substantially equal to
    Ep
    377 Ω, i.e. between 360 Ω and 380 Ω.
    The second stiffening layers 313, 323 of the first and second insulation arms 310, 320 comprise a first and a second spacing column 315, 325 in correspondence with the first and second bonding pads 354, 355 of the circuit respectively. reading 340 and in electrical connection with the corresponding conduction track 311, 321. In a practical application of the invention, the first and second spacing columns 315, 325 may have, for example, a diameter of 0.7 μm.
    The first and second spacing columns 315, 325 are extended respectively by a third and a fourth bonding pad 316, 326. The third and the fourth bonding pad 316, 326 are dimensioned in correspondence with the first and second respectively bonding pad 354, 355. Thus, each of the third and the fourth bonding pad 316, 326 can have an area of 1 μm by 1 μm.
    As illustrated in FIG. 4B, the first and second insulation arms 310, 320 and the first and second spacing columns are included in a third sacrificial layer 329 with the first and second spacing columns 315, 325 which form projection of the stiffening layer 313, 323. The first and second spacing columns extend with the third and fourth bonding pads 316, 326 over the entire thickness of the third sacrificial layer 329. Thus, the third and the fourth bonding pad 316, 326 outcrop of the third sacrificial layer 329 on the face of the third sacrificial layer 329 which is opposite to the first and second insulation arms 310, 320.
    The third sacrificial layer 329 and the spacing columns 315, 325 are dimensioned so that the reflection surface 330, 331 forms with the first absorption layer 210 a quarter wave cavity.
    A second part 331 of the reflection surface 330, 331 is also included in the third sacrificial layer 329 by being flush with the latter in correspondence with the first part 330 of the reflection surface 330, 331.
    The third sacrificial layer 329, in order to allow its selective etching during the etching of the first and second sacrificial layer 352, 142 and a molecular bonding between the assembly formed by the third sacrificial layer 329, the second part 331 of the surface of reflection 330, 331 and the third and fourth connection pads 316, 326, and the assembly formed by the first sacrificial layer 352, the first part of the reflection surface 330, 331 and the bonding pads 354, 355.
    Thus, the step of supplying the isolation arms comprises the following substeps:
    deposition of a first full-plate stiffening layer in contact with the second sacrificial layer 142 on the face of the second sacrificial layer 142 which is opposite to the second stop layer, delimitation in the first full-plate stiffening layer of the holes intended forming the breakthroughs of the first stiffening layers 312,
    322 of the first and second insulating arms 310, 320, deposition in the openings of the first, second and third conductors, deposition of a full plate conductive layer in contact with the first full plate stiffening layer on one face of the first stiffening layer which is opposite to the second sacrificial layer 142, deposition of a second full plate stiffening layer in contact with the full plate conductive layer on one face of the full plate conductive layer which is opposite to the first full stiffening layer plate, selective etching of the first full plate stiffening layer, of the full plate conductive layer and of the second full plate stiffening layer so as to form the first and second insulating arms, deposition of the third sacrificial layer 329 so the first and second insulation arms 310, 320 are included in the third sacrificial layer, a first and a second opening in the third sacrificial layer and in respectively second stiffening layers 313, 323 of the first and second insulating arms 310, 320 in order to allow the formation of the spacing columns 315, 325 and third and fourth bonding pads 316, 326, provision of a third opening in the third sacrificial layer in order to allow the formation of a second part 331 of the reflection surface 330, 331, metallic deposit in the first, second and third openings of the third sacrificial layer and in the first and second openings of each of the second stiffening layers 313, 323 in order to form the first and second spacing columns, the third and fourth bonding pads and the second part 331 of the reflection surface 330, 331, the third sacrificial layer 329, the second part 331 of the reflection surface 330, 331 and the bonding pads 315 , 325 can be subjected to a planarization sub-step in order to promote molecular bonding
    The fourth step of bonding the transistor 100 / isolation arm 310, 320 assembly with the read circuit 340 makes it possible to form the detection structure 10 according to the invention. During this step, the assembly formed by the third sacrificial layer 329, the second part 331 of the reflection surface 330, 331, and the third and fourth bonding pads 316, 326 are molecularly bonded to the assembly formed by the first sacrificial layer 352, the first part 330 of the reflection surface 330, 331, and the bonding pads 354, 355 with the first bonding pad 354 placed in relation to the third bonding pad 316 and the second bonding pad 355 related to the fourth bonding pad 326.
    Once the molecular bonding has been carried out and in the context of the preferred variant of the invention in which the second grid has not been produced during the second step, additional sub-steps are provided to form the first portion of the sacrificial layer 142 and the second grid 130.
    According to this variant, the first portion of the sacrificial layer 142 is made of the same material as that of the second portion of the sacrificial layer 142 formed during the second step. Thus, the first portion of the sacrificial layer 142 can be made of Al2O3 alumina or AIN aluminum nitride. The first portion of the sacrificial layer 142 thus forms an electrical insulator for electrically insulating the second grid from the first, second and third zones 111, 112.
    The second grid 130 is advantageously made of titanium nitride TiN with a thickness substantially equal to 10 nm. According to this possibility, the second grid 130 forms a fourth absorbent element to that formed by the first grid 120. In the same way as for the first absorption layer 210, the second grid 130 can also be made of a metal and have a thickness Ep respecting the following inequalities:
    150/3 <- <700/3 with p the resistivity of the metallic material forming
    Ep said conduction track 311, 321. In order to provide absorption of electromagnetic radiation, this same conduction track 311, 321 can advantageously respect the following inequalities:
    320/3 <^ - <420/3 Ep
    Even more advantageously - can be substantially equal to
    Ep
    377 Ω, i.e. between 360 Ω and 380 Ω.
    Likewise, in the case where the second grid 130 does not provide any function for absorbing electromagnetic radiation, the second grid 130 can be made of another material without departing from the scope of the invention. Thus, it is, for example, conceivable that such a second grid 130 is made of polycrystalline silicon Si. It is also conceivable that the second grid 130 is formed of two conductive layers, one of which may possibly be made of nitride TiN titanium.
    Thus, according to this variant of the invention, the fourth step further comprises the following steps:
    formation of the first portion second barrier layer 142 in contact with the first, second and third zones 111, 112, 113 on the face of the latter which is opposite to the first grid 120, opening of a through passage 131, illustrated in FIG. 1B, in the first portion of the second sacrificial layer 142, said through passage opening into the second zone 112, formation of the second grid 130 in contact with the first portion of the second sacrificial layer 142, one via conductor being then formed in the through passage 131 between the second grid 130 and the second zone 112.
    Whether in the preferred variant described above or in the variant in which the second grid 120 is provided during the second step, the fourth step further comprises the following substep of selective etching of the first, second and third layers sacrificial 352,142, 329, for example by an acid attack, the rest of the detection structure 10 being protected by the first and second barrier layers 351,141.
    In this way, the transistor 100 is thermally isolated from the rest of the detection structure 10 by the first and second isolation arms 310, 320.
    It will be noted that this last step, with that of etching and thinning of the substrate, makes it possible, in the case where the detection structure 10 equips a component comprising a plurality of detection structures 10A, 10B, 10C, 10D, to isolate thermally the detection structure 10 of the corresponding reading circuit and of the detection structures 10A, 10B, 10C, 10D which are directly adjacent to it.
    Thus, FIG. 5 illustrates an example of integration of a detection structure 10 according to the invention in such a component 1 comprising a plurality of detection structures 10A, 10B, 10C, 10D organized in the form of a square matrix . It can thus be seen in FIG. 5 that the arrangement of the bonding pads 342, 343 in offset makes it possible to optimize the surface occupied by each of the structures 10A, 10B, 10C, 10D, the first connection pad 342A, 342B, 342C , 342D being adjacent to the second connection pad 343A, 343B, 343C, 343D of the structural OA, 10B, 10C, 10D which is directly adjacent to it on the left, the second connection pad 343A, 343B, 343C, 343D being adjacent to the first connection pad 342A, 342B, 342C, 342D of the detection structure 10A, 10B, 10C, 10D which is directly adjacent to it on the right. With such a configuration, the reception surface, i.e. the surface of the first grid 120, occupies an optimized surface. Such a configuration suggests components having a pitch between two structures 10A, 10B, 10C, 10D of the order of 5 μm.
    FIG. 6 illustrates the grid arrangement of a detection structure 10 according to a second embodiment of the invention in which the surface of absorption elements is optimized. Such a detection structure 10 differs from a detection structure 10 according to the first embodiment in that the transistor has a first, second, third, fourth and fifth region 111,112,113, 114,115 and a first and third gate 120,140.
    The first, second and third zone 111, 112, 113 and the first grid 120 have a configuration identical to that described in the first embodiment, with the difference that, the second zone 112 acts as a drain and it is therefore , therefore, it which is in short-circuit with the first grid 120. Thus, the second conduction track 321 makes it possible to polarize the second zone 112 and the first grid 120, the first conduction track 311 making it possible to polarize the first zone 111.
    The fourth zone 114 is a zone of the first type of conductivity, with a configuration similar to that of the first and the second zone 111, 112. Similarly to the third zone 113, the fifth zone 115 can be a totally depleted zone. The fifth zone 115 surrounds the second zone 112 and the fourth zone 114 surrounds the fifth zone.
    The third grid 140 has a configuration substantially identical to that of the first grid and thus comprises, in the same way as the first grid, a second absorption layer 220
    The second conduction track 321 is configured in order to, as illustrated in FIG. 6, short-circuit the first grid 120 with the third grid 130 and with the second zone 112. The second conduction track 312 is configured in order to, as illustrated in FIG. 6, short-circuit the first zone 111 with the fourth zone 114. In this way, the structure has two transistors in parallel with one another and has an increased gate area and a ratio from the grid width to the optimized grid length.
    Of course, if in the first and the second embodiment described above, the first gate 120 is short-circuited with one of the first and the second zone 111, 112, it is also possible, without it is beyond the scope of the invention that the first, second zone and the first grid are polarized independently of each other. In such a configuration, it is then necessary to provide a third conductive track supplied either in one of the first and second isolation arms, or in a third isolation arm. Similarly, in the case where a second grid 130 is provided on the face of the first, second and third zones 111, 112, 113 opposite the first face if the latter can be polarized by means of an electrical connection to the second zone 112, it is also possible, without departing from the scope of the invention, for the second grid 130 to be polarized otherwise. In such a configuration, it is necessary to provide a third conductive track provided either in one of the first and second isolation arms, or in a third isolation arm.
    It may also be noted that if in the embodiments described above, a second grid 130 is provided, such a second grid 130 is not necessary for the proper functioning of the invention. Thus, it is perfectly conceivable to adjust the threshold voltage of the transistor by means of charges trapped in one of the first and the second electrically insulating layer or even to provide a polarization independent of the first gate 120.
    In the same way, if in the first and second embodiment there is provided a reflection surface 330, 331, it is also conceivable, without departing from the scope of the invention, that the detection structure 10 is not.
    权利要求:
    Claims (15)
    [1" id="c-fr-0001]
    1. Bolometer-type detection structure (10) for detecting electromagnetic radiation, the detection structure (10) comprising:
    at least a first absorbent element configured to absorb electromagnetic radiation, a transistor (100) of the MOS-FET type associated with the first absorbent element for detecting the rise in temperature of said absorbent element during the absorption of electromagnetic radiation, the transistor comprising:
    o at least a first and at least a second zone (111, 112) of a first type of conductivity, o at least a third zone (113) separating the first and the second zone from one another (111, 112), the third zone (113) being of a type of conductivity selected from a group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone (113) is substantially empty of carriers , o at least a first grid (120) arranged to polarize the third zone (113), the detection structure (10) being characterized in that the first grid (120) comprises at least a first metal portion forming the first absorbent element , said first metal portion having a thickness Ep respecting the following inequalities: 150/3 <- <700/3 with p the resistivity of the material
    Metallic ep forming said metallic portion.
    [2" id="c-fr-0002]
    2. Detection structure (10) according to claim 1 in which the first metallic portion of the first grid is made of a metal of the “middle-of-gap” type for the third zone, the first metallic portion preferably being of a metal chosen from the group comprising titanium nitrides, tantalum nitrides and molybdenum silicides for a third zone (113) made of silicon, the first metallic portion being advantageously made of titanium nitride for a third zone (113) made made of silicon.
    [3" id="c-fr-0003]
    3. Detection structure (10) according to claim 2 wherein the first gate (120) is short-circuited with one of the first and the second zone (111,112).
    [4" id="c-fr-0004]
    4. Detection structure (10) according to any one of claims 1 to 3, in which the first zone (111) is surrounded by the third zone (113), the third zone (113) being surrounded by the second zone ( 112).
    [5" id="c-fr-0005]
    5. Detection structure (10) according to any one of claims 1 to 4, in which the transistor (100) further comprises:
    a fourth and fifth zone (114,115), the fourth zone (114) being of the first type of conductivity and the fifth zone (115) being of a type of conductivity selected from the group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone is substantially empty of carriers, a third grid arranged to polarize the fifth zone (115), in which the fifth zone (115) separates the second and the fourth zone (112,114), and in which the third grid (140) comprises at least a second metal portion forming a second absorbent element, said second metal portion having a thickness Ep respecting the following inequalities: 150/3 <- <600/3 with p the resistivity of the metallic material forming said
    Ep second metal portion.
    [6" id="c-fr-0006]
    6. Detection structure (10) according to claims 4 and 5, wherein the fifth zone (115) surrounds the second zone (112) and wherein the fourth zone (114) surrounds the fifth zone (115).
    [7" id="c-fr-0007]
    7. Detection structure (10) according to any one of claims 1 to 6, in which the third zone (113) is of the type of conductivity in which the third zone (113) is substantially empty of carriers.
    [8" id="c-fr-0008]
    8. Detection structure (10) according to any one of claims 1 to 7, in which there is provided a reflection surface (330, 331) configured to form with the first absorbing element a quarter wave cavity.
    [9" id="c-fr-0009]
    9. Detection structure (10) according to any one of claims 1 to 8 further comprising a read circuit (340) configured to bias the transistor (100) and to determine, from an operating current of the transistor (100) a rise in temperature of the absorbent element, in which the read circuit (340) and the transistor (100) are separated from each other by at least a first and a second isolation arm ( 310, 320) each comprising at least one conductive track (311, 321) for biasing the transistor (100).
    [10" id="c-fr-0010]
    10. Detection structure (10) according to claim 9, in which each of the conductive tracks (311, 321) of the first and second insulation arms (310, 320) is a metallic track forming a third absorbent element and has a thickness Ep respecting the following inequalities: 150/3 <- <600 Ω with p resistivity
    Ep of the metallic material forming said second metallic portion.
    [11" id="c-fr-0011]
    11. Detection structure (10) according to any one of claims 1 to 10, in which the transistor further comprises a second gate (130) on a face of the transistor which is opposite to the first gate (120), and in which the second grid (130) comprises at least one metallic portion a fourth absorbent element.
    [12" id="c-fr-0012]
    12. Method for manufacturing a detection structure (10) comprising the following steps:
    providing at least a first, second and third zone (111, 112, 113), the first and second zone (III, 112) being of a first type of conductivity, the third zone (113) separating one of the other the first and the second zone (111,112) and the third zone (113) being of a type of conductivity selected from a group comprising a second type of conductivity opposite to the first type of conductivity and a type of conductivity in which the third zone is substantially empty of carriers, formation of a first gate (120) arranged to polarize the third zone (113) so as to form a transistor (100) of the MOS-FET type, the first gate (100) comprising at least a first metal portion forming an absorbent element configured to absorb electromagnetic radiation, in this way the transistor (100) is associated with the absorbent element to detect the rise in temperature of said absorbent element during the absorption of electromagnetic radiation genetic, said first metal portion having a thickness Ep respecting the following inequalities: 150/3 <- <600/3 with p the resistivity of the metallic material forming said
    Ep metallic portion.
    [13" id="c-fr-0013]
    13. The manufacturing method according to claim 12 wherein during the step of forming the first grid (120), the first metal portion of the first grid (120) is made of a metal of the “middle-of-gap” type. For the third zone, the first metallic portion preferably being in a metal chosen from the group comprising titanium nitrides, tantalum nitrides and molybdenum silicides for a third zone (113) made of silicon, the first metallic portion being advantageously made of titanium nitride for a third zone (113) made of silicon.
    [14" id="c-fr-0014]
    14. The manufacturing method according to claim 12 or 13 wherein steps are further provided for:
    forming a read circuit (340) configured to bias the transistor (100) and to determine, from an operating current of the transistor (100) a rise in temperature of the absorbent element, forming a first and a second isolation arm (310, 320), each of the first and second isolation arms having at least one conductive track (311, 321), combining together the transistor (100), the first and second arms of isolation (310, 320) and of the read circuit, so that the read circuit (340) is electrically connected to the transistor (100) via the conductive tracks
    10 (311, 321) respectively of the first and second insulation arms (310, 320).
    [15" id="c-fr-0015]
    15. The manufacturing method according to claim 14, in which during the step of supplying the reading circuit (340), a sub-step is provided for forming a reflection surface (330, 331),
    15 and in which during the step of associating together the transistor (100), the first and second isolation arms (310, 320) and the read circuit (340), the reflection surface (330, 331) has an arrangement so as to form with the titanium nitride portion of the first grid (120) a quarter wave cavity.
    1/7
    S.61062
    2/7
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    同族专利:
    公开号 | 公开日
    WO2018055276A1|2018-03-29|
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    FR3056292B1|2020-11-20|
    EP3516356A1|2019-07-31|
    CA3036810A1|2018-03-29|
    US10732050B2|2020-08-04|
    RU2752294C2|2021-07-26|
    CN109791077A|2019-05-21|
    CN109791077B|2021-10-29|
    KR20190050842A|2019-05-13|
    RU2019111867A|2020-10-22|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE3001899A1|1980-01-19|1981-07-23|Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt|Planar phototransistor with concentric zones - has emitter zone, filling majority of base zone except base contacting region|
    US20100244029A1|2009-03-27|2010-09-30|Semiconductor Energy Laboratory Co., Ltd.|Semiconductor device|
    WO2015059227A1|2013-10-25|2015-04-30|Robert Bosch Gmbh|Thermally shorted bolometer|
    US20150153236A1|2013-12-04|2015-06-04|Sony Corporation|Infrared detector and detection method thereof, and electronic apparatus|
    EP2995916A1|2014-09-12|2016-03-16|Excelitas Technologies Singapore Pte Ltd.|Surface micro-machined infrared sensor using highly temperature stable interferometric absorber|
    DE102014221609A1|2014-10-24|2016-04-28|Robert Bosch Gmbh|Sensor for detecting infrared radiation and method for operating the sensor|WO2019229353A1|2018-05-30|2019-12-05|Commissariat à l'énergie atomique et aux énergies alternatives|Sensitive pixel based detection system comprising a thermal detector and a compensation device|
    WO2021123616A1|2019-12-19|2021-06-24|Commissariat A L'energie Atomique Et Aux Energies Alternatives|High-sensitivity electromagnetic radiation detection component and method for manufacturing such a component|WO2004074167A2|2003-02-20|2004-09-02|Technion Research & Development Foundation Ltd.|A device and method for stacked multi-level uncoupled electrostatic actuators|
    FR2861172B1|2003-10-15|2006-06-02|Ulis|BOLOMETRIC DETECTOR, INFRARED DETECTION DEVICE USING SUCH A BOLOMETRIC DETECTOR AND METHOD FOR MANUFACTURING SAME|
    FR2867273B1|2004-03-04|2006-09-08|Commissariat Energie Atomique|METHOD FOR PRODUCING A DEVICE FOR THE THERMAL DETECTION OF A RADIATION COMPRISING AN ACTIVE MICROBOLOMETER AND A PASSIVE MICROBOLOMETER|
    FR2879819B1|2004-12-21|2007-02-23|Ulis Soc Par Actions Simplifie|COMPONENT FOR DETECTING ELECTROMAGNETIC RADIATION, IN PARTICULAR INFRARED|
    US9945725B2|2012-02-16|2018-04-17|Heimann Sensor Gmbh|Thermopile infrared sensor structure with a high filling level|
    JP5988020B2|2012-03-26|2016-09-07|日本電気株式会社|Solid-state imaging device and manufacturing method thereof|
    CN102593133B|2012-03-29|2014-09-24|江苏物联网研究发展中心|Microstructure for infrared focal plane array device and manufacturing method thereof|
    CN103852171B|2014-01-17|2016-12-07|中国科学院上海技术物理研究所|A kind of non-brake method Long Wave Infrared Probe absorbent layer structure|FR3087262A1|2018-10-12|2020-04-17|Commissariat A L'energie Atomique Et Aux Energies Alternatives|ELECTROMAGNETIC RADIATION DETECTION DEVICE HAVING A SUSPENDED THREE-DIMENSIONAL STRUCTURE|
    FR3087261B1|2018-10-12|2021-11-12|Commissariat Energie Atomique|METHOD OF MANUFACTURING AN ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH IMPROVED ENCAPSULATION STRUCTURE|
    FR3089291A1|2018-11-29|2020-06-05|Commissariat A L'energie Atomique Et Aux Energies Alternatives|Electromagnetic radiation detection structure with optimized absorption and method for forming such a structure|
    FR3090098B1|2018-12-13|2021-11-26|Commissariat Energie Atomique|A method of manufacturing a detection structure with an optimized absorption rate and said structure|
    FR3099248B1|2019-07-26|2021-08-06|Commissariat Energie Atomique|Umbrella absorber bolometer, component comprising such a bolometer and method of manufacturing such a bolometer|
    法律状态:
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    2018-03-23| PLSC| Publication of the preliminary search report|Effective date: 20180323 |
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    2021-09-30| PLFP| Fee payment|Year of fee payment: 6 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1658921A|FR3056292B1|2016-09-22|2016-09-22|BOLOMETER TYPE ELECTROMAGNETIC RADIATION DETECTION STRUCTURE AND METHOD FOR MANUFACTURING SUCH A STRUCTURE|
    FR1658921|2016-09-22|FR1658921A| FR3056292B1|2016-09-22|2016-09-22|BOLOMETER TYPE ELECTROMAGNETIC RADIATION DETECTION STRUCTURE AND METHOD FOR MANUFACTURING SUCH A STRUCTURE|
    KR1020197011431A| KR20190050842A|2016-09-22|2017-09-19|Electromagnetic radiation detection structure of a bolometer type and method for manufacturing such a structure|
    CN201780058385.9A| CN109791077B|2016-09-22|2017-09-19|Bolometric structure for detecting electromagnetic radiation and method for manufacturing such a structure|
    PCT/FR2017/052501| WO2018055276A1|2016-09-22|2017-09-19|Structure, of the bolometer type, for detecting electromagnetic radiation and process for manufacturing such a structure|
    US16/334,109| US10732050B2|2016-09-22|2017-09-19|Structure for detecting electromagnetic radiation of the bolometer type and method for manufacturing such a structure|
    CA3036810A| CA3036810A1|2016-09-22|2017-09-19|Structure, of the bolometer type, for detecting electromagnetic radiation and process for manufacturing such a structure|
    EP17783913.1A| EP3516356A1|2016-09-22|2017-09-19|Structure, of the bolometer type, for detecting electromagnetic radiation and process for manufacturing such a structure|
    RU2019111867A| RU2752294C2|2016-09-22|2017-09-19|Detecting structure of the bolometer type for detecting electromagnetic radiation and the method for manufacturing such a structure|
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